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ID: 494586.0, MPI für Plasmaphysik / Articles, Books, Inbooks
Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardement: experiment and modeling
Authors:Bizyukov, I.; Mutzke, A.; Schneider, R.; Davis, J.
Language:English
Date of Publication (YYYY-MM-DD):2010
Title of Journal:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume:268
Issue / Number:17-18
Start Page:2631
End Page:2638
Copyright:Elsevier B.V.
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/Stellarator Theory
External Affiliations:Karazin Kharkiv National University, Faculty of Physics and Technologies, 31 Kurchatov Ave., Kharkiv 61108, Ukraine;
Institute of Physics, Ernst-Moritz-Arndt University, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany;
University of Toronto Institute for Aerospace Studies, 4925 Dufferin Street, Toronto, Ontario, Canada M3H 5T6
Identifiers:DOI:10.1016/j.nimb.2010.06.035
URL:http://dx.doi.org/10.1016/j.nimb.2010.06.035
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