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ID: 56103.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Small-scale plasticity in thin Cu and Al films
Authors:Dehm, G.; Balk, T. J.; Edongue, H.; Arzt, E.
Language:English
Date of Publication (YYYY-MM-DD):2003
Title of Journal:Microelectronic Engineering
Volume:70
Issue / Number:2-4
Start Page:412
End Page:424
Review Status:not specified
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:Patrick Wellner
Affiliations:MPI für Metallforschung/Abt. Arzt
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