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Theoretical Analysis of the Embedded Layer Formed by High-Energy Au Implantation into Si(II)
Authors: Nakagawa, S. T.; Nakano, S.; Ogiso, H.; Iwaki, M.; Hashimoto, M.; Eckstein, W.
Date of Publication (YYYY-MM-DD): 2000
Title of Journal: Review of Scientific Instruments
Volume: 71
Start Page: 793
End Page: 796
Document Type: Article
ID: 288984.0