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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)     Display Documents



  history
ID: 111960.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten
Authors:Kauffmann, F.
Language:German
Date of Approval (YYYY-MM-DD):2003-08-29
Name of University:Universität Stuttgart
Place of University:Stuttgart
Physical Description
(e.g. Total Number of Pages):
109 S.
Audience:Experts Only
Document Type:PhD-Thesis
Communicated by:Patrick Wellner
Affiliations:MPI für Metallforschung/Abt. Arzt
Identifiers:URL:http://elib.uni-stuttgart.de/opus/volltexte/2004/1...
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