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ID:
112654.0,
MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems) |
Quantitative analysis of dislocation arrangements induced by electromigration in a passivated Al (0.5 wt % Cu) interconnect |
Authors: | Barabash, R. I.; Ice, G. E.; Tamura, N.; Valek, B. C.; Bravman, J. C.; Spolenak, R.; Patel, J. R. | Language: | English | Date of Publication (YYYY-MM-DD): | 2003-05-01 | Title of Journal: | Journal of Applied Physics | Journal Abbrev.: | J. Appl. Phys. | Volume: | 93 | Issue / Number: | 9 | Start Page: | 5701 | End Page: | 5706 | Review Status: | Peer-review | Audience: | Experts Only | Comment of the Author/Creator: | Date: 2003, MAY 1 | External Publication Status: | published | Document Type: | Article |
Communicated by: | Holger Pfaff | Affiliations: | MPI für Metallforschung/Abt. Arzt
| External Affiliations: | Oak Ridge Natl Lab, Div Met & Ceram, Oak Ridge, TN 37831 USA.; Adv Light Source, Berkeley, CA 94720 USA.; Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA.; Stanford Synchrotron Radiat Labs, Stanford, CA 94309 USA.
| Identifiers: | ISI:000182296700108 [ID No:1] ISSN:0021-8979 [ID No:2] | |
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