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ID:
117480.0,
MPI für Plasmaphysik / Talks, Posters, Lectures |
Particle-growth in hydrogen-methane plasmas |
Authors: | Shimizu, T.; Jacob, W.; Thomas, H.; Morfill, G.; Abe, T.; Watanabe, Y.; Sato, N. | Language: | English | Name of Conference/Meeting: | 7th Asia-Pacific Conference on Plasma Science and Technology (APCPST) and 17th Symposium on Plasma Science for Materials (SPSM) | Place of Conference/Meeting: | Fukuoka | (Start) Date of Event (YYYY-MM-DD): | 2004-06-29 | End Date of Conference/Meeting (YYYY-MM-DD): | 2004-07-02 | Audience: | Experts Only | Document Type: | Poster |
Communicated by: | N. N. | Affiliations: | MPI für Plasmaphysik/Oberflächenphysik
| External Affiliations: | Max-Planck-Institut für extraterrestrische Physik; Department of Electronic Device and Materials, Tohoku Institute of Technology, 35-1, Kasumi-cho, Yagiyama, Taihaku-ku, Sendai 982-8577, Japan; Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1, Hakozaki, Higashi-ku, Fukuoka 812-8581, Japan; Tohoku University, 05, Aramaki-Aza-Aaoba, Aoba-ku, Sendai 980-8579, Japan
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