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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)     Display Documents



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ID: 12184.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Microstructure of Physical Vapour Deposited Ti-Si-N Coatings
Authors:Kauffmann, F.; Dehm, G.; Arzt, E.; Schier, V.; Henke, S.; Schattke, A.; Beck, T.
Place of Publication:Warrendale, PA
Date of Publication (YYYY-MM-DD):2002
Title of Proceedings:Nanoparticulate Materials
Start Page:W7.3.1
End Page:W7.3.6
Title of Series:Materials Research Society Symposium Proceedings
Corporate Body ed. Series:Materials Research Society
Name of Conference/Meeting:Nanoparticulate Materials. Symposium held at the MRS Fall Meeting
Place of Conference/Meeting:Boston, Mass.
(Start) Date of Conference/Meeting
 (YYYY-MM-DD):
2001-11-26
End Date of Conference/Meeting 
 (YYYY-MM-DD):
2001-11-30
Review Status:not specified
Audience:Experts Only
Free Keywords:09-ar_2002;
External Publication Status:published
Document Type:Conference-Paper
Affiliations:MPI für Metallforschung/Abt. Arzt
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