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          Institute: Fritz-Haber-Institut     Collection: Physical Chemistry     Display Documents



  history
ID: 17731.1, Fritz-Haber-Institut / Physical Chemistry
Electrochemical micromachining of stainless steel by ultrashort voltage pulses
Authors:Cagnon, Laurent; Kirchner, Viola; Kock, Matthias; Schuster, Rolf; Ertl, Gerhard; Gmelin, W. Thomas; Kück, Heinz
Language:English
Date of Publication (YYYY-MM-DD):2003
Title of Journal:Zeitschrift für Physikalische Chemie
Journal Abbrev.:Z. Phys. Chem.
Volume:217
Issue / Number:04
Start Page:299
End Page:313
Copyright:© R Oldenbourg Verlag, Munich
Review Status:Peer-review
Audience:Experts Only
Abstract / Description:Application of ultrashort voltage pulses to a tiny tool electrode under suitable electrochemical conditions enables precise three-dimensional machining of stainless steel. In order to reach submicrometer precision and high processing speed, the formation of a passive layer on the workpiece surface during the machining process has to be prevented by proper choice of the electrolyte. Mixtures of concentrated hydrofluoric and hydrochloric acid are well suited in this respect and allow the automated machining of complicated three-dimensional microelements. The dependence of the machining precision on pulse duration and pulse amplitude was investigated in detail.
Free Keywords:Stainless steel; Microstructures; Microfabrication; Electrochemistry; Short voltage pulses
External Publication Status:published
Document Type:Article
Communicated by:Gerhard Ertl
Affiliations:Fritz-Haber-Institut/Physical Chemistry
External Affiliations:Gmelin WT, Kück H, Univ Stuttgart, IZFM, D-70174 Stuttgart, Germany
Identifiers:URL:http://www.atypon-link.com/OLD/doi/abs/10.1524/zpc...
DOI:10.1524/zpch.217.4.299.20383
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