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          Institute: MPI für Festkörperforschung     Collection: FKF Publikationen 1999     Display Documents



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ID: 181043.0, MPI für Festkörperforschung / FKF Publikationen 1999
Shadow evaporation method for fabrication of sub 10 nm gaps between metal electrodes.
Authors:Philipp, G.; Weimann, T.; Hinze, P.; Burghard, M.; Weis, J.
Date of Publication (YYYY-MM-DD):1999
Title of Journal:Microelectronic Engineering
Volume:46
Start Page:157
End Page:160
Copyright:Jahrbuch 2000, Copyright MPG 2000
Audience:Not Specified
Intended Educational Use:No
Document Type:Article
Communicated by:Michaela Asen-Palmer
Affiliations:MPI für Festkörperforschung
Identifiers:LOCALID:15823
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