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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)     Display Documents



ID: 198853.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Microstructure of thermal hillocks on blanket Al thin films
Authors:Kim, D.; Heiland, B.; Nix, W. D.; Arzt, E.; Deal, M. D.; Plummer, J. D.
Language:English
Date of Publication (YYYY-MM-DD):2000
Title of Journal:Thin Solid Films
Volume:371
Start Page:278
End Page:282
Review Status:not specified
Audience:Experts Only
Intended Educational Use:No
External Publication Status:published
Document Type:Article
Communicated by:Holger Pfaff
Affiliations:MPI für Metallforschung/Abt. Arzt
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