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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)     Display Documents



  history
ID: 198959.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Diffusional Hillock formation in Al thin films contolled by creep
Authors:Kim, D.; Nix, W. D.; Arzt, E.; Deal, M. D.; Plummer, J. D.
Language:English
Publisher:MRS
Place of Publication:Warrendale/PA
Date of Publication (YYYY-MM-DD):2000
Title of Proceedings:Thin Films: Stresses and Mechanical Properties VIII
Start Page:129
End Page:134
Title of Series:Materials Research Symposium Proceedings
Volume (in Series):594
Name of Conference/Meeting:Thin Films: Stresses and Mechanical Properties VIII. Symposium V at the 1999 MRS Fall Meeting
Place of Conference/Meeting:Boston, Mass.
(Start) Date of Conference/Meeting
 (YYYY-MM-DD):
1999-11-29
End Date of Conference/Meeting 
 (YYYY-MM-DD):
1999-12-03
Review Status:not specified
Audience:Experts Only
External Publication Status:published
Document Type:Conference-Paper
Communicated by:Holger Pfaff
Affiliations:MPI für Metallforschung/Abt. Arzt
External Affiliations:Thin Films: Stresses and Mechanical Properties VIII External Publication Status: published Place of Conference/Meeting: Place of Publication: Name of Conference/Meeting: Review Status: not specified Publisher: Materials Research Society Audience: Experts Only Volume (in Series): 594 Full Name(s) of Editor(s) of Proceedings:
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