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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)     Display Documents



ID: 199006.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Localized measurement of strains in damascene copper interconnects by convergent-beam electron diffraction
Authors:Nucci, J. A. R.; Keller, R.; Krämer, S.; Volkert, C. A.; Gross, M.
Language:English
Publisher:MRS
Place of Publication:Warrendale
Date of Publication (YYYY-MM-DD):2000
Title of Proceedings:Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Start Page:D 851
End Page:D 856
Title of Series:Materials Research Society Symposia Proceedings
Volume (in Series):612
Name of Conference/Meeting:Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Place of Conference/Meeting:San Francisco, Calif.
(Start) Date of Conference/Meeting
 (YYYY-MM-DD):
2000-04-23
End Date of Conference/Meeting 
 (YYYY-MM-DD):
2000-04-27
Review Status:not specified
Audience:Experts Only
External Publication Status:published
Document Type:Conference-Paper
Communicated by:Holger Pfaff
Affiliations:MPI für Metallforschung/Abt. Arzt
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