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          Institute: Fritz-Haber-Institut     Collection: Inorganic Chemistry     Display Documents



  history
ID: 2021.0, Fritz-Haber-Institut / Inorganic Chemistry
Comparison of the gas release at a hydrophobic and a hydrophilic direct bonding interface
Authors:Mack, S.; Baumann, H.; Werner, H.; Schlögl, Robert
Editors:Gösele, Ulrich; Baumgart, Helmut; Abe, Takano; Hunt, Charles; Iyer, S.
Language:English
Place of Publication:Pennington, NJ
Publisher:Electrochemical Society
Date of Publication (YYYY-MM-DD):1998
Title of Book:Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications
Start Page:299
End Page:306
Physical Description:XI, 618 S.
Title of Series:Proceedings volume / Electrochemical Society
Volume:97-36
Corporate Body (Series):Electrochemical Society
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:InBook
Communicated by:Robert Schlögl
Affiliations:Fritz-Haber-Institut/Inorganic Chemistry/Inorganic Chemistry
MPI für Mikrostrukturphysik
Identifiers:URL:1-566-77189-7
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