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          Institute: MPI für Plasmaphysik     Collection: Articles, Books, Inbooks     Display Documents



  history
ID: 220885.0, MPI für Plasmaphysik / Articles, Books, Inbooks
Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization. Invited paper
Authors:Gans, T.; Osiac, M.; O'Connell, D.; Kadetov, V. A.; Czarnetzki, U.; Schwarz-Selinger, T.; Halfmann, H.; Awakowicz, P.
Language:English
Research Context:12th International Congress on Plasma Physics, 2004-10-25 to 2004-10-29
Date of Publication (YYYY-MM-DD):2005
Title of Journal:Plasma Physics and Controlled Fusion
Journal Abbrev.:PPCF
Volume:47
Issue / Number:5A
Start Page:A353
End Page:A360
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/Surface Science
External Affiliations:Institute for Plasma and Atomic Physics, CPST, Ruhr-Univ. Bochum, 44780 Bochum; Institute for Electrical Engineering and Plasma Technology, CPST, Ruhr-Univ. Bochum, 44780 Bochum
Identifiers:URL:http://www.iop.org/EJ/abstract/0741-3335/47/5A/026
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