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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



ID: 223954.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
Low-temperature direct wafer bonding with ambient pressure plasma activation
Authors:Gabriel, M.; Brad, J.; Suess, R.; Reiche, M.; Eichler, M.
Publisher:MANCEF
Date of Publication (YYYY-MM-DD):2004
Title of Proceedings:Proceedings 9th International Conference on the Commercialization of Micro and Nano Systems
Start Page:353
End Page:357
Audience:Not Specified
Comment of the Author/Creator:Date: 2004, 2004
External Publication Status:published
Document Type:Conference-Paper
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
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