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          Institute: MPI für Plasmaphysik     Collection: Articles, Books, Inbooks     Display Documents



ID: 233780.0, MPI für Plasmaphysik / Articles, Books, Inbooks
Multivariate analysis of noise-corrupted PECVD data
Authors:von Keudell, A.; Annen, A.; Dose, V.
Language:English
Date of Publication (YYYY-MM-DD):1997
Title of Journal:Thin Solid Films
Volume:307
Start Page:65
End Page:70
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/OP/DA
Identifiers:DOI:10.1016/S0040-6090(97)00313-1
ISSN:00406090
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