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          Institute: Fritz-Haber-Institut     Collection: Physical Chemistry     Display Documents



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ID: 23674.0, Fritz-Haber-Institut / Physical Chemistry
Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses
Authors:Trimmer, Andrew L.; Hudson, John L.; Kock, Matthias; Schuster, Rolf
Language:English
Date of Publication (YYYY-MM-DD):2003-05-12
Title of Journal:Applied Physics Letters
Journal Abbrev.:Appl. Phys. Lett.
Volume:82
Issue / Number:19
Start Page:3327
End Page:3329
Copyright:© American Institute of Physics
Review Status:Peer-review
Audience:Experts Only
Abstract / Description:We show that complex patterns including three-dimensional structures, lines, curved features, and arrays can be machined in substrates in single-step processing without the need for rastering. High-aspect-ratio nanometer accurate features were machined in nickel using ultrashort voltage pulse electrochemical machining. Experiments were conducted with two different tool shapes. The first was a combination of rrectangles, squares, and a half circle; the second was a 2x2 array. The effect of pulse duration and electrolyte concentration on feature resolution was studied. Structures with 90 nm widths were made by applying 2 ns voltage pulses.
External Publication Status:published
Document Type:Article
Communicated by:Gerhard Ertl
Affiliations:Fritz-Haber-Institut/Physical Chemistry
External Affiliations:Trimmer AL, Hudson JL, Univ Virginia, Dept Chem Engn, 102 Engineers Way,POB 400741, Charlottesville, VA 22904 USA
Identifiers:URL:http://scitation.aip.org/getabs/servlet/GetabsServ... [only for subscribers]
DOI:10.1063/1.1576499
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