Home News About Us Contact Contributors Disclaimer Privacy Policy Help FAQ

Home
Search
Quick Search
Advanced
Fulltext
Browse
Collections
Persons
My eDoc
Session History
Login
Name:
Password:
Documentation
Help
Support Wiki
Direct access to
document ID:


          Institute: MPI für Plasmaphysik     Collection: Articles, Books, Inbooks     Display Documents



  history
ID: 237856.0, MPI für Plasmaphysik / Articles, Books, Inbooks
Control of the plasma chemistry of a pulsed inductively coupled methane plasma
Authors:Bauer, M.; Schwarz-Selinger, T.; Kang, H.; von Keudell, A.
Language:English
Date of Publication (YYYY-MM-DD):2005
Title of Journal:Plasma Sources Science and Technology
Volume:14
Start Page:543
End Page:548
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/Materialforschung
External Affiliations:Arbeitsgruppe Reaktive Plasmen, Institut für Experimentalphysik II, Ruhr-Universität Bochum, Universitätsstr. 150, 44780 Bochum, Germany
Identifiers:DOI:10.1088/0963-0252/14/3/017
ISSN:13616595 (Online)
The scope and number of records on eDoc is subject to the collection policies defined by each institute - see "info" button in the collection browse view.