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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)     Display Documents



  history
ID: 240307.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Ehemalige Abt. Arzt (Micro/nanomechanics of Thin Films and Biological Systems)
Microstructural size effects on the hardness of nanocrystalline
TiN/amorphous-SiNx coatings prepared by magnetron sputtering
Authors:Kauffmann, F.; Dehm, G.; Schier, V.; Schattke, A.; Beck, T.; Lang, S.; Arzt, E.
Language:English
Date of Publication (YYYY-MM-DD):2005-02-01
Title of Journal:Thin Solid Films
Volume:473
Issue / Number:1
Start Page:114
End Page:122
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:Cornelia Schurr
Affiliations:MPI für Metallforschung/Abt. Arzt
External Affiliations:Walter AG, Derendinger Str. 53, Postfach 20 49, 72072 Tübingen, Germany
Robert Bosch GmbH, Postfach 10 60 50, 70049 Stuttgart, Germany
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