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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen 2005     Display Documents



  history
ID: 275390.0, MPI für Mikrostrukturphysik / Publikationen 2005
Ammonium hydroxide effect on low-temperature wafer bonding energy enhancement
Authors:Chao, Y.-L.; Tong, Q.-Y.; Lee, T.-H.; Reiche, M.; Scholz, R.; Woo, J.C.S.; Gö”sele, U.
Date of Publication (YYYY-MM-DD):2005
Title of Journal:Electrochemical & Solid State Letters
Volume:8
Issue / Number:3
Start Page:G74
End Page:G77
Review Status:not specified
Audience:Not Specified
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
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