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ID:
288965.0,
MPI für Eisenforschung GmbH / Interface Chemistry and Surface Engineering |
Potassium Sorbate Solutions as Copper Chemical Mechanical Planarization (CMP) Based Slurries |
Authors: | Abelev, E.; Smith, A. J.; Hassel, A. W.; Ein-Eli, Y. | Date of Publication (YYYY-MM-DD): | 2007 | Title of Journal: | Electrochim. Acta | Volume: | 52 | Start Page: | 5150 | End Page: | 5158 | Review Status: | not specified | Audience: | Not Specified | External Publication Status: | published | Document Type: | Article |
Affiliations: | MPI für Eisenforschung GmbH
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