Home News About Us Contact Contributors Disclaimer Privacy Policy Help FAQ

Home
Search
Quick Search
Advanced
Fulltext
Browse
Collections
Persons
My eDoc
Session History
Login
Name:
Password:
Documentation
Help
Support Wiki
Direct access to
document ID:


          Institute: MPI für Eisenforschung GmbH     Collection: Interface Chemistry and Surface Engineering     Display Documents



  history
ID: 288965.0, MPI für Eisenforschung GmbH / Interface Chemistry and Surface Engineering
Potassium Sorbate Solutions as Copper Chemical Mechanical Planarization (CMP) Based Slurries
Authors:Abelev, E.; Smith, A. J.; Hassel, A. W.; Ein-Eli, Y.
Date of Publication (YYYY-MM-DD):2007
Title of Journal:Electrochim. Acta
Volume:52
Start Page:5150
End Page:5158
Review Status:not specified
Audience:Not Specified
External Publication Status:published
Document Type:Article
Affiliations:MPI für Eisenforschung GmbH
The scope and number of records on eDoc is subject to the collection policies defined by each institute - see "info" button in the collection browse view.