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          Institute: Fritz-Haber-Institut     Collection: Physical Chemistry     Display Documents



ID: 289244.0, Fritz-Haber-Institut / Physical Chemistry
Electrochemical machining of stainless steel microelements with ultrashort voltage pulses
Authors:Kirchner, Viola; Cagnon, Laurent; Schuster, Rolf; Ertl, Gerhard
Language:English
Date of Publication (YYYY-MM-DD):2001-09-10
Title of Journal:Applied Physics Letters
Journal Abbrev.:Appl. Phys. Lett.
Volume:79
Issue / Number:11
Start Page:1721
End Page:1723
Copyright:© 2001 American Institute of Physics
Review Status:Peer-review
Audience:Experts Only
Abstract / Description:An electrochemical pulse technique enables the fabrication of three-dimensional microelements from stainless steel. The method is based on the application of ultrashort (nanosecond) voltage pulses, whereupon electrochemical reactions are locally confined with submicrometer precision. Employing properly shaped tool electrodes enables the machining of freestanding cantilevers or microstructures directly to a metal sheet. Due to gentle removal of the material, the grain structure of the material is revealed without any chemical or mechanical modifications. This is demonstrated by measuring the vibration frequency of a cantilever, and agrees well with the value derived from the bulk material properties.
Free Keywords:Electrolytic machining; stainless steel; crystal microstructure; micromechanical devices
External Publication Status:published
Document Type:Article
Communicated by:Gerhard Ertl
Affiliations:Fritz-Haber-Institut/Physical Chemistry
External Affiliations:© 2001 American Institute of Physics
Identifiers:URL:http://ojps.aip.org/getabs/servlet/GetabsServlet?p...
DOI:10.1063/1.1401783
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