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          Institute: MPI für Plasmaphysik     Collection: Articles, Books, Inbooks     Display Documents



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ID: 293633.0, MPI für Plasmaphysik / Articles, Books, Inbooks
Particle-growth in hydrogen-methane plasmas
Authors:Shimizu, T.; Jacob, W.; Thomas, H.; Morfill, G.; Abe, T.; Watanabe, Y.; Sato, N.
Language:English
Research Context:7th Asia-Pacific Conference on Plasma Science and Technology (APCPST) and 17th Symposium on Plasma Science for Materials (SPSM), 2004-06-29 to 2004-07-02
Date of Publication (YYYY-MM-DD):2006
Title of Journal:Thin Solid Films
Volume:506-507
Start Page:652
End Page:655
Copyright:Elsevier
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/Material Research (MF)
External Affiliations:Centre for Interdisciplinary Plasma Science, Max-Planck-Institute for extraterrestrial Physics, Giessenbachstr. 1, 85741 Garching;
Department of Electronic Device and Materials, Tohoku Institute of Technology, 35-1, Kasumi-cho, Yagiyama, Taihaku-ku, Sendai 982-8577, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1, Hakozaki, Higashi-ku, Fukuoka 812-8581, Japan;
Tohoku University, 05, Aramaki-Aza-Aaoba, Aoba-ku, Sendai 980-8579, Japan
Identifiers:URL:http://dx.doi.org/10.1016/j.tsf.2005.08.059
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