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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



ID: 312789.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
Wafer direct bonding with ambient pressure plasma activation
Authors:Gabriel, M.; Johnson, B.; Suss, R.; Reiche, M.; Eichler, M.
Date of Publication (YYYY-MM-DD):2006
Title of Journal:Microsystem Technologies
Volume:12
Issue / Number:5
Start Page:397
End Page:400
Review Status:Peer-review
Audience:Experts Only
Intended Educational Use:No
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
Identifiers:LOCALID:P7152
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