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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



ID: 312792.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
Patterned DBD pretreatment at ambient pressure for low-temperature
wafer bonding
Authors:Eichler, M.; Michel, B.; Thomas, M.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M.; Klages, C. P.
Place of Publication:Japonsko, Japan
Date of Publication (YYYY-MM-DD):2006
Title of Proceedings:Proceedings 10th International Symposium on High Pressure Low
Temperature Plasma Chemistry (HAKONE X)
Start Page:322
End Page:325
Audience:Experts Only
Intended Educational Use:No
External Publication Status:published
Document Type:Conference-Paper
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
Identifiers:LOCALID:P7149
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