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          Institute: MPI für Plasmaphysik     Collection: Articles, Books, Inbooks     Display Documents



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ID: 321205.0, MPI für Plasmaphysik / Articles, Books, Inbooks
Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF Plasma
Authors:Osiac, M.; Schwarz-Selinger, T.; O'Connell, D.; Heil, B.; Petrovic, Z. L.; Turner, M. M.; Gans, T.; Czarnetzki, U.
Language:English
Date of Publication (YYYY-MM-DD):2007
Title of Journal:Plasma Sources Science Technology
Volume:16
Start Page:355
End Page:363
Copyright:IOP
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/Material Research (MF)
External Affiliations:Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Bochum 44780, Germany;
Institute of Physics Belgrade, Zemun POB 68 Zemun 11080, Serbia;
National Centre for Plasma Science and Technology, Dublin City University, Dublin 9, Ireland;
Faculty of Physics, University of Craiova, Craiova, Romania;
Institute for Electrical Engineering and Plasma Technology, CPST, Ruhr-University Bochum, 44780 Bochum, Germany;
Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK
Identifiers:URL:http://dx.doi.org/10.1088/0963-0252/16/2/019
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