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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



ID: 33105.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
High epitaxial quality Y2O3 high-k dielectric on vicinal Si(001) surfaces
Authors:Apostolopoulos, G.; Vellianitis, G.; Dimoulas, A.; Alexe, M.; Scholz, R.; Fanciulli, M.; Dekadjevi, D.; Wiemer, C.
Date of Publication (YYYY-MM-DD):2002
Title of Journal:Applied Physics Letters
Volume:81
Issue / Number:19
Start Page:3549
End Page:3551
Review Status:not specified
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
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