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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



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ID: 350319.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
Adhesive wafer bonding for wafer-level fabrication of microring resonators.
Authors:Dragoi, V.; Mittendorfer, G.; Thanner, C.; Alexe, M.; Pintilie, L.; Hamacher, M.; Heidrich, H.
Date of Publication (YYYY-MM-DD):2007
Title of Journal:Romanian Journal of Information Science and Technology
Volume:10
Issue / Number:1
Start Page:3
End Page:11
Review Status:not specified
Audience:Not Specified
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
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