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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



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ID: 351688.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
Wafer-Scale Parallel Alignment of Silicon Nanofinsand Silica Nanochannels from Size-Reduction Strategy
Authors:Chen, X.; Ji, R.; Scholz, R.; Steinhart, M.; Nielsch, K.; Gösele, U.
Date of Publication (YYYY-MM-DD):2007
Title of Journal:Chemistry of Materials
Volume:19
Start Page:3
Review Status:not specified
Audience:Not Specified
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
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