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          Institute: MPI für Mikrostrukturphysik     Collection: Publikationen des MPI-MSP     Display Documents



ID: 352264.0, MPI für Mikrostrukturphysik / Publikationen des MPI-MSP
Enhancement of wafer bow of free-standing GaN substrates due to high dose hydrogen implantation: Implication for GaN layer transfer applications
Authors:Singh, R.; Radu, I.; Christiansen, S. H.; Gö”sele, U.
Date of Publication (YYYY-MM-DD):2007
Title of Journal:Semiconductor Science and Technology
Volume:22
Issue / Number:4
Start Page:418
End Page:421
Review Status:not specified
Audience:Not Specified
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Mikrostrukturphysik
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