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          Institute: Fritz-Haber-Institut     Collection: Physical Chemistry     Display Documents



ID: 42747.0, Fritz-Haber-Institut / Physical Chemistry
Electrochemical micromachining with ultrashort voltage pulses – a versatile method with lithographical precision
Authors:Kock, Matthias; Kirchner, Viola; Schuster, Rolf
Language:English
Date of Publication (YYYY-MM-DD):2003-09-30
Title of Journal:Electrochimica Acta
Journal Abbrev.:Electrochim. Acta
Volume:48
Issue / Number:20-22
Start Page:3213
End Page:3219
Title of Issue:Electrochemistry in Molecular and Microscopic Dimensions
Full name of Issue-Editor(s):Schultze, Joachim W.; Staikov, Georgi
Copyright:© 2003 Elsevier Ltd. All rights reserved.
Review Status:Peer-review
Audience:Experts Only
Abstract / Description:Upon the application of ultrashort voltage pulses electrochemical reactions can be spatially confined with nanometer accuracy, which allows for high precision machining of electrochemical active materials. As an example, electrochemical machining parameters for the micromachining of Ni are derived from conventional electrochemical cyclic voltammetry. Depending on the average potentials of tool and workpiece, overall corrosion of the workpiece and the location of the counter reaction of workpiece dissolution can be controlled. The pulse duration provides a direct control for setting the machining accuracy. Machining precisions below 100 nm were achieved by the application of 500 ps voltage pulses.
Free Keywords:Micromachining; Microstructure; Nickel; Short voltage pulses; Doublelayer charging
External Publication Status:published
Document Type:Article
Communicated by:Gerhard Ertl
Affiliations:Fritz-Haber-Institut/Physical Chemistry
Identifiers:URL:http://www.sciencedirect.com/science?_ob=ArticleUR...
DOI:10.1016/S0013-4686(03)00374-8
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