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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Abt. Mittemeijer (Phase Transformations, Thermodynamics, and Kinetics)     Display Documents



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ID: 430725.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Abt. Mittemeijer (Phase Transformations, Thermodynamics, and Kinetics)
Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques
Authors:Wang, J. Y.; Starke, U.; Mittemeijer, E. J.
Language:English
Date of Publication (YYYY-MM-DD):2009
Title of Journal:Thin Solid Films
Volume:517
Start Page:3402
End Page:3407
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:Ralf Schacherl
Affiliations:MPI für Metallforschung/Abt. Mittemeijer
Identifiers:DOI:10.1016/j.tsf.2009.01.007
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