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          Institute: MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung)     Collection: Abt. Mittemeijer (Phase Transformations, Thermodynamics, and Kinetics)     Display Documents



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ID: 47155.0, MPI für Intelligente Systeme (ehemals Max-Planck-Institut für Metallforschung) / Abt. Mittemeijer (Phase Transformations, Thermodynamics, and Kinetics)
Determination of the interdiffusion coefficient for Si/Al multilayers by auger electron spectroscopical sputter depth profiling
Authors:Wang, J. Y.; Zalar, A.; Zhao, Y. H.; Mittemeijer, E. J.
Language:English
Date of Publication (YYYY-MM-DD):2003
Title of Journal:Thin Solid Films
Volume:433
Start Page:92
End Page:96
Review Status:not specified
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:Ralf Schacherl
Affiliations:MPI für Intelligente Systeme/Abt. Mittemeijer
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