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          Institute: MPI für Eisenforschung GmbH     Collection: Interface Chemistry and Surface Engineering     Display Documents



  history
ID: 498730.0, MPI für Eisenforschung GmbH / Interface Chemistry and Surface Engineering
Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning, and oxidation
Authors:Michel, B.; Giza, M.; Krumrey, M.; Eichler, M.; Grundmeier, G.; Klages, C. P.
Language:English
Date of Publication (YYYY-MM-DD):2009
Title of Journal:Journal of Applied Physics
Journal Abbrev.:J. Appl. Phys.
Volume:105
Issue / Number:7
Sequence Number of Article:073302 (9pp)
Review Status:not specified
Audience:Not Specified
External Publication Status:published
Document Type:Article
Affiliations:MPI für Eisenforschung GmbH
Identifiers:DOI:10.1063/1.3088872
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