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          Institute: MPI für Physik     Collection: MPI für Physik     Display Documents



ID: 543555.0, MPI für Physik / MPI für Physik
Results from a first production of enhanced Silicon Test Structures produced by ITE Warsaw
Authors:Bergauer, T.; Dragicevic, M.; Frey, M.; Grabiec, P.; Grodner, M.; Hänsel, S.; Hartmann, F.; Hoffmann, K. -H.; Hrubec, J.; Krammer, M.; Kucharski, K.; Macchiolo, A.; Marczewski, J.
Date of Publication (YYYY-MM-DD):2009
Title of Journal:Nuclear Instruments and Methods in Physics Research Section A
Journal Abbrev.:Nucl.Instrum.Meth.A
Issue / Number:598
Start Page:86
End Page:88
Audience:Not Specified
Intended Educational Use:No
Abstract / Description:Monitoring the manufacturing process of silicon sensors is essential to ensure stable quality of the produced detectors. During the CMS silicon sensor production we were utilising small Test Structures (TS) incorporated on the cut-away of the wafers to measure certain process-relevant parameters. Experience from the CMS production and quality assurance led to enhancements of these TS.

Another important application of TS is the commissioning of new vendors. The measurements provide us with a good understanding of the capabilities of a vendor's process.

A first batch of the new TS was produced at the Institute of Electron Technology in Warsaw Poland. We will first review the improvements to the original CMS test structures and then discuss a selection of important measurements performed on this first batch.
Classification / Thesaurus:Semiconductor Detectors
External Publication Status:published
Document Type:Conference-Paper
Communicated by:N.N.
Affiliations:MPI für Physik
Identifiers:LOCALID:MPP-2009-297
URL:http://dx.doi.org/10.1016/j.nima.2008.08.014
URL:http://publications.mppmu.mpg.de/?action=search&mp...
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