ID:
544829.0,
MPI für Physik / MPI für Physik |
Status of the ALMY semitransparent, amorphous silicon sensors for optical position monitoring systems |
Authors: | Bauer, F.; Danielyan, V.; Horvat, S.; Kroha, H. |
Date of Publication (YYYY-MM-DD): | 2002 |
Title of Journal: | Nuclear Instruments and Methods in Physics Research Section A |
Journal Abbrev.: | Nucl.Instrum.Meth.A |
Issue / Number: | 504 |
Start Page: | 166 |
End Page: | 169 |
Audience: | Not Specified |
Intended Educational Use: | No |
Abstract / Description: | Semitransparent optoelectronic position sensors (`ALMY sensors') have been developed for high-precision multipoint alignment monitoring systems. The thin-film amorphous silicon strip sensors provide up to 90% transmittance for visible laser light and a position measurement accuracy of better than 5 mu m over sensitive areas of several square centimeters. We report about the results of the recent optimization of the sensor performance and of the readout electronics. |
Classification / Thesaurus: | Experimental Physics |
External Publication Status: | published |
Document Type: | Article |
Communicated by: | N.N. |
Affiliations: | MPI für Physik
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Identifiers: | LOCALID:MPP-2002-103 URL:http://publications.mppmu.mpg.de/?action=search&mp... |
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