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          Institute: MPI für Physik     Collection: MPI für Physik     Display Documents



ID: 544829.0, MPI für Physik / MPI für Physik
Status of the ALMY semitransparent, amorphous silicon sensors for optical position monitoring systems
Authors:Bauer, F.; Danielyan, V.; Horvat, S.; Kroha, H.
Date of Publication (YYYY-MM-DD):2002
Title of Journal:Nuclear Instruments and Methods in Physics Research Section A
Journal Abbrev.:Nucl.Instrum.Meth.A
Issue / Number:504
Start Page:166
End Page:169
Audience:Not Specified
Intended Educational Use:No
Abstract / Description:Semitransparent optoelectronic position sensors (`ALMY sensors') have been developed for high-precision multipoint alignment monitoring systems. The thin-film amorphous silicon strip sensors provide up to 90% transmittance for visible laser light and a position measurement accuracy of better than 5 mu m over sensitive areas of several square centimeters. We report about the results of the recent optimization of the sensor performance and of the readout electronics.
Classification / Thesaurus:Experimental Physics
External Publication Status:published
Document Type:Article
Communicated by:N.N.
Affiliations:MPI für Physik
Identifiers:LOCALID:MPP-2002-103
URL:http://publications.mppmu.mpg.de/?action=search&mp...
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