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          Institute: MPI für Plasmaphysik     Collection: Articles, Books, Inbooks     Display Documents



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ID: 573926.0, MPI für Plasmaphysik / Articles, Books, Inbooks
In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to the hydrogen atom beam
Authors:Markelj, S.; Pelicon, P.; Cadez, I.; Schwarz-Selinger, T.; Jacob, W.
Language:English
Date of Publication (YYYY-MM-DD):2012
Title of Journal:Journal of Vacuum Science and Technology A
Volume:30
Sequence Number of Article:041601 (8pp)
Copyright:AVS (American Vacuum Society) Science & Technology of Materials, Interfaces, and Processing
Review Status:Peer-review
Audience:Experts Only
External Publication Status:published
Document Type:Article
Communicated by:N. N.
Affiliations:MPI für Plasmaphysik/Plasma Edge and Wall (E2M)
Identifiers:DOI:10.1116/1.4723637
URL:http://dx.doi.org/10.1116/1.4723637
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