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Entries: 1-10  
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Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM
Authors: Hofsäss, H.; Mutzke, A.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2013-09-15
Name of Conference/Meeting: 18th International Conference on Surface Modification of Materials
Place of Conference/Meeting: Kusadasi
Document Type: Talk at Event
ID: 669565.0
Operational limit of a planar DC magnetron cluster source due to target erosion
Authors: Rai, A.; Mutzke, A.; Bandelow, G.; Schneider, R.; Ganeva, M.; Pipa, A.; Hippler, R.
Date of Publication (YYYY-MM-DD): 2013
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 316
Start Page: 6
End Page: 12
Document Type: Article
ID: 655978.0
 
Full text / Content available
SDTrimSP-2D: Simulation of Particles Bombarding on a Two Dimensional Target - Version 2.0
Authors: Mutzke, A.; Schneider, R.; Bandelow, G.
Place of Publication: Garching
Publisher: Max-Planck-Institut für Plasmaphysik
Date of Publication (YYYY-MM-DD): 2013
Document Type: Report
ID: 669011.0
 
Full text / Content available
Mechanisms of layer growth in microwave-PECVD silan plasmas – Experiment and simulation
Authors: Ramisch, E.; Mutzke, A.; Schneider, R.; Stroth, U.
Date of Publication (YYYY-MM-DD): 2013
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 316
Start Page: 249
End Page: 256
Document Type: Article
ID: 671648.0
 
Full text / Content available
Macroscopic parameters of the interaction of an Ar+ ion beam with a Si pitch grating
Authors: Bizyukov, I.; Mutzke, A.; Mayer, M.; Langhuth, H.; Krieger, K.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 278
Start Page: 4
End Page: 7
Document Type: Article
ID: 579514.0
 
Full text / Content available
Modeling of hydrogen isotope exchange from porous graphite
Authors: Rai, A.; Schneider, R.; Mutzke, A.; Ravikant, M.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 291
Start Page: 58
End Page: 64
Document Type: Article
ID: 579518.0
 
Full text / Content available
Depth of origin of sputtered atoms: Exploring the dependence on relevant target properties to identify the correlation with low-energy ranges
Authors: Wittmaack, K.; Mutzke, A.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 281
Start Page: 37
End Page: 44
Document Type: Article
ID: 584254.0
 
Full text / Content available
Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level
Authors: Mutzke, A.; Bizyukov, I.; Langhuth, H.; Mayer, M.; Krieger, K.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Nuclear Instruments and Methods in Physics Research B
Volume: 293
Start Page: 11
End Page: 15
Document Type: Article
ID: 610426.0
 
Full text / Content available
Modeling of altered layer formation during reactive ion etching of GaAs
Authors: Mutzke, A.; Rai, A.; Schneider, R.; Angelin, E.; Hippler, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Applied Surface Science
Volume: 263
Start Page: 626
End Page: 632
Document Type: Article
ID: 614876.0
 
Full text / Content available
Effect of increasing surface on sputtering and reflection
Authors: Bizyukov, I.; Mutzke, A.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Problems of Atomic Science and Technology
Volume: 6
Start Page: 111
End Page: 113
Document Type: Article
ID: 633543.0
Entries: 1-10  
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