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Microstructural size effects on the hardness of nanocrystalline
TiN/amorphous-SiNx coatings prepared by magnetron sputtering
Authors: Kauffmann, F.; Dehm, G.; Schier, V.; Schattke, A.; Beck, T.; Lang, S.; Arzt, E.
Date of Publication (YYYY-MM-DD): 2005-02-01
Title of Journal: Thin Solid Films
Volume: 473
Issue / Number: 1
Start Page: 114
End Page: 122
Document Type: Article
ID: 240307.0
Microstructure of Physical Vapour Deposited Ti-Si-N Coatings
Authors: Kauffmann, F.; Dehm, G.; Arzt, E.; Schier, V.; Henke, S.; Schattke, A.; Beck, T.
Place of Publication: Warrendale, PA
Date of Publication (YYYY-MM-DD): 2002
Name of Conference/Meeting: Nanoparticulate Materials. Symposium held at the MRS Fall Meeting
Title of Proceedings: Nanoparticulate Materials
Start Page: W7.3.1
End Page: W7.3.6
Title of Series: Materials Research Society Symposium Proceedings
Document Type: Conference-Paper
ID: 12184.0
 
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