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Growth precursors for amorphous hydrogenated carbon films
Authors: Jacob, W.; Bauer, M.; Schwarz-Selinger, T.; von Keudell, A.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2005-04-17
Name of Conference/Meeting: 6th Workshop on Frontiers in Low Temperature Plasma Diagnostics
Place of Conference/Meeting: Les Houches
Document Type: Talk at Event
ID: 211454.0
Wachstumsspezies bei der plasmagestützten Abscheidung amorpher, wasserstoffhaltiger Kohlenstoffschichten
Authors: Schwarz-Selinger, T.; Bauer, M.; Jacob, W.; von Keudell, A.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2005-03-16
Name of Conference/Meeting: 12. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen
Place of Conference/Meeting: Mühlleithen
Document Type: Talk at Event
ID: 211211.0
Ion-induced surface activation, chemical sputtering, and hydrogen release during plasma-assisted hydrocarbon film growth
Authors: Hopf, C.; Jacob, W.; von Keudell, A.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Journal of Applied Physics
Volume: 97
Sequence Number of Article: 094904
Document Type: Article
ID: 126350.0
Growth precursors for a-C:H film deposition in a pulsed inductively coupled methane plasmas
Authors: Bauer, M.; Schwarz-Selinger, T.; Jacob, W.; von Keudell, A.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Journal of Applied Physics
Volume: 98
Sequence Number of Article: 073302
Document Type: Article
ID: 226979.0
Control of the plasma chemistry of a pulsed inductively coupled methane plasma
Authors: Bauer, M.; Schwarz-Selinger, T.; Kang, H.; von Keudell, A.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Plasma Sources Science and Technology
Volume: 14
Start Page: 543
End Page: 548
Document Type: Article
ID: 237856.0
Elementary processes in plasma-surface interaction: H-atom and ion-induced chemisorption of methyl on hydrocarbon film surfaces
Authors: von Keudell, A.; Jacob, W.
Date of Publication (YYYY-MM-DD): 2004
Title of Journal: Progress in Surface Science
Volume: 76
Start Page: 21
End Page: 54
Document Type: Article
ID: 117421.0
Particle-induced oscillations in inductively coupled plasmas
Authors: von Keudell, A.; Bauer, M.
Date of Publication (YYYY-MM-DD): 2004
Title of Journal: Plasma Sources Science and Technology
Volume: 13
Start Page: 285
End Page: 292
Document Type: Article
ID: 117493.0
Elementary Surface Processes during Growth and Erosion of Amorphous Hydrogenated Carbon Films
Authors: Jacob, W.; Hopf, C.; von Keudell, A.; Meier, M.; Schwarz-Selinger, T.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2003-11-10
Name of Conference/Meeting: 5th Meeting on Diamond, Amorphous Carbon, Nanotubes and Related Materials
Place of Conference/Meeting: Rio de Janeiro
Document Type: Talk at Event
ID: 112670.0
Chemical Sputtering of Hydrocarbon Films
Authors: Hopf, C.; Jacob, W.; von Keudell, A.
(Start) Date of Event
(YYYY-MM-DD):
 2003-09-17
Name of Conference/Meeting: 10th International Workshop on Carbon Materials for Fusion Application
Document Type: Poster
ID: 112407.0
Chemical Sputtering of Hydrocarbon Layers
Authors: Jacob, W.; Hopf, C.; von Keudell, A.; Meier, M.; Schwarz-Selinger, T.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2003-07-22
Name of Conference/Meeting: ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces
Place of Conference/Meeting: Avila
Document Type: Talk at Event
ID: 112668.0
Entries: 1-10  
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