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Entries: 1-3  
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Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning, and oxidation
Authors: Michel, B.; Giza, M.; Krumrey, M.; Eichler, M.; Grundmeier, G.; Klages, C. P.
Date of Publication (YYYY-MM-DD): 2009
Title of Journal: Journal of Applied Physics
Volume: 105
Issue / Number: 7
Sequence Number of Article: 073302 (9pp)
Document Type: Article
ID: 498730.0
Patterned DBD pretreatment at ambient pressure for low-temperature
wafer bonding
Authors: Eichler, M.; Michel, B.; Thomas, M.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M.; Klages, C. P.
Place of Publication: Japonsko, Japan
Date of Publication (YYYY-MM-DD): 2006
Title of Proceedings: Proceedings 10th International Symposium on High Pressure Low
Temperature Plasma Chemistry (HAKONE X)
Start Page: 322
End Page: 325
Document Type: Conference-Paper
ID: 312792.0
Novel coating systems and surface technologies for continuous processing of steel sheet
Authors: Schuhmacher, B.; Müschenborn, W.; Stratmann, M.; Schultrich, B.; Klages, C. P.; Kretschmer, M.; Seyfert, U.; Forster, F.; Tiller, H. J.
Date of Publication (YYYY-MM-DD): 2001
Title of Journal: Advanced Engineering Materials
Volume: 3
Start Page: 681
End Page: 689
Document Type: Article
ID: 12225.0
Entries: 1-3  
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