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Titania-assisted electron-beam and synchrotron lithography
Authors: Skorb, E. V.; Grützmacher, D.; Dais, C.; Guzenko, V. A.; Sokolov, V. G.; Gaevskaya, T. V.; Sviridov, D. V.
Date of Publication (YYYY-MM-DD): 2010-08-06
Title of Journal: Nanotechnology
Volume: 21
Issue / Number: 31
Sequence Number of Article: 315301
Document Type: Article
ID: 488911.0
 
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