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Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes
Authors: Nadzeyka, A.; Peto, L.; Bauerdick, S.; Mayer, M.; Keskinbora, K.; Grévent, C.; Weigand, M.; Hirscher, M.; Schütz, G.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Microelectronic Engineering
Volume: 98
Start Page: 198
End Page: 201
Document Type: Article
ID: 618623.0
Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures
Authors: Mayer, M.; Grévent, C.; Szeghalmi, A.; Knez, M.; Weigand, M.; Rehbein, S.; Schneider, G.; Baretzky, B.; Schütz, G.
Date of Publication (YYYY-MM-DD): 2011
Title of Journal: Ultramicroscopy
Volume: 111
Start Page: 1706
End Page: 1711
Document Type: Article
ID: 573867.0
Entries: 1-2  
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