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Adhesive wafer bonding for wafer-level fabrication of microring resonators.
Authors: Dragoi, V.; Mittendorfer, G.; Thanner, C.; Alexe, M.; Pintilie, L.; Hamacher, M.; Heidrich, H.
Date of Publication (YYYY-MM-DD): 2007
Title of Journal: Romanian Journal of Information Science and Technology
Volume: 10
Issue / Number: 1
Start Page: 3
End Page: 11
Document Type: Article
ID: 350319.0
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