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Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation
Authors: Heuer, H.; Wenzel, C.; Herrmann, D.; Hubner, R.; Zhang, Z. L.; Bartha, J. W.
Date of Publication (YYYY-MM-DD): 2006-12-05
Title of Journal: Thin Solid Films
Volume: 515
Issue / Number: 4
Start Page: 1612
End Page: 1617
Document Type: Article
ID: 318153.0
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