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Potassium Sorbate Solutions as Copper Chemical Mechanical Planarization (CMP) Based Slurries |
Authors: Abelev, E.; Smith, A. J.; Hassel, A. W.; Ein-Eli, Y. | Date of Publication (YYYY-MM-DD): 2007 | Title of Journal: Electrochim. Acta | Volume: 52 | Start Page: 5150 | End Page: 5158 | Document Type: Article | ID: 288965.0 |
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Studies on Copper Repassivation Characteristics in Basic Solutions Another Step towards a “Traditional” CMP |
Authors: Ein-Eli, Y.; Abelev, E.; Smith, A. J.; Hassel, A. W. | (Start) Date of Conference/Meeting (YYYY-MM-DD): 2006-08-22 | Name of Conference/Meeting: 6th International Symposium on Electrochemical Micro & Nanosystem Technologies | Place of Conference/Meeting: Bonn, Germany | Document Type: Talk at Event | ID: 289028.0 |
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Copper Repassivation Characteristics in Carbonate-Based Solutions |
Authors: Abelev, E.; Smith, A. J.; Hassel, A. W.; Ein Eli, Y. | Date of Publication (YYYY-MM-DD): 2006 | Title of Journal: J. Electrochem. Soc. | Volume: 153 | Start Page: B337 | End Page: B343 | Document Type: Article | ID: 288949.0 |
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