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Entries: 1-3  
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Nanometer deformation of elastically anisotropic materials studied by nanoindentation
Authors: Yeap, K. B.; Kopycinska-Müller, M.; Hangen, U. D.; Zambaldi, C.; Hübner, R.; Niese, S.; Zschech, E.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Philosophical Magazine
Volume: 92
Issue / Number: 25-27
Start Page: 3142
End Page: 3157
Document Type: Article
ID: 619028.0
Chemical bonds in damaged and pristine low-κ materials: A comparative EELS study
Authors: Stegmann, H.; Özdöl, V. B.; Koch, C.; van Aken, P. A.; Engelmann, J.; Potapov, P.; Zschech, E.
Date of Publication (YYYY-MM-DD): 2008
Name of Conference/Meeting: Twelfth European Workshop on Materials for Advanced Metallization 2008 (MAM2008)
Title of Journal: Microelectronic Engineering
Volume (in Journal): 85
Start Page: 2169
End Page: 2171
Document Type: Conference-Paper
ID: 379416.0
Interconnects for Microelectronics
Authors: Spolenak, R.; Zschech, E.
Title of Book: Metal Based Thin Films for Electronics
Start Page: 7
End Page: 24
Place of Publication: Weinheim
Publisher: Wiley-VCH
Date of Publication (YYYY-MM-DD): 2003
Document Type: InBook
ID: 55978.0
Entries: 1-3  
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