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Entries: 1-7  
Modeling and sensitivity studies of cc-rf CF4 plasma
Authors: Bandelow, G.; Schneider, R.; Meichsner, J.
(Start) Date of Event
Name of Conference/Meeting: 21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2012)
Document Type: Poster
ID: 610678.0
CC-RF discharge in CF4/H2: Simulation and experiment
Authors: Stoppa, G.; Stepanov, S.; Schneider, R.; Meichsner, J.
(Start) Date of Event
Name of Conference/Meeting: DPG-Frühjahrstagung 2011
Document Type: Poster
ID: 549016.0
Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas
Authors: Dittmann, K.; Matyash, K.; Nemschokmichal, S.; Meichsner, J.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2010
Title of Journal: Contributions to Plasma Physics
Volume: 50
Issue / Number: 10
Start Page: 942
End Page: 953
Document Type: Article
ID: 521744.0
Sheath dynamics in capacitively coupled RF plasmas
Authors: Dittmann, K.; Matyash, K.; Schneider, R.; Meichsner, J.
(Start) Date of Conference/Meeting
Name of Conference/Meeting: DPG Frühjahrstagung
Place of Conference/Meeting: Greifswald
Document Type: Talk at Event
ID: 429433.0
Simulation of ion energy distributions in Ar/CH4 rf discharges with ion extraction
Authors: Ikkurthi, V.; Matyash, K.; Meichsner, J.; Melzer, A.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2009
Title of Journal: Plasma Sources Science and Technology
Volume: 18
Sequence Number of Article: 035003 (7pp)
Document Type: Article
ID: 429770.0
Particle-in-Cell Simulation of RF discharges in Ar/CH4 Gas Mixture
Authors: Ikkurthi, V. R.; Matyash, K.; Schneider, R.; Meichsner, J.; Melzer, A.
(Start) Date of Event
Name of Conference/Meeting: DPG AMOP-Frühjahrstagung
Document Type: Poster
ID: 359538.0
Radio-frequency discharges in oxygen: III. Comparison of modelling and experiment
Authors: Matyash, K.; Schneider, R.; Dittmann, K.; Meichsner, J.; Bronold, F. X.; Tskhakaya, D.
Date of Publication (YYYY-MM-DD): 2007
Title of Journal: Journal of Physics D
Volume: 40
Start Page: 6601
End Page: 6607
Document Type: Article
ID: 327675.0
Entries: 1-7  
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