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Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system
Authors: Yoon, J.-S.; Fischer, R.; Gori, S.; Knauer, J.
Date of Publication (YYYY-MM-DD): 2004
Title of Journal: Journal of the Korean Physical Society
Volume: 6
Start Page: 1544
End Page: 1552
Document Type: Article
ID: 208503.0
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