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Ammonium hydroxide effect on low-temperature wafer bonding energy enhancement
Authors: Chao, Y.-L.; Tong, Q.-Y.; Lee, T.-H.; Reiche, M.; Scholz, R.; Woo, J.C.S.; Gö”sele, U.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Electrochemical & Solid State Letters
Volume: 8
Issue / Number: 3
Start Page: G74
End Page: G77
Document Type: Article
ID: 275390.0
Preamorphization implantation-assisted boron activation in bulk germanium and germanium-on-insulator
Authors: Chao, Y.-L.; Prussin, S.; Woo, J.C.S.; Scholz, R.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Applied Physics Letters
Volume: 87
Issue / Number: 14
Start Page: 142102/1
End Page: 142102/3
Document Type: Article
ID: 275389.0
Entries: 1-2  
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